Hexafluoroethane
Hexafluoroethane (C₂F₆) is a perfluoroethane that is a colorless, odorless, non-flammable gas under room temperature with highly stable chemical properties. Hexafluoroethane is widely used in semiconductor manufacturing, refrigeration, medicine, and other fields, but it also faces environmental challenges due to its high global warming potential (GWP).
Application
- Semiconductor manufacturing
Plasma etching: Used for selective etching of metal silicides (such as TiSi₂) and oxides (such as SiO₂), replacing traditional etchants (such as octafluorobutane). Device cleaning: As a cleaning gas after the CVD process to remove residual contaminants. Refrigeration and Energy Mixed refrigerants: Combined with trifluoromethane (CHF₃) to form R508A (61% C₂F₆) and R508B (54% C₂F₆), used in ultra-low temperature refrigeration systems (such as MRI equipment). Insulating gas: High dielectric strength (critical electric field strength 30.39 bar) makes it suitable for cooling high-voltage equipment. Medical and special fields Retinal surgery: As vitreous filling gas (tamponade), assisting retinal reattachment. Fiber optic production: Used in coating processes to improve the ability of optical fibers to resist environmental corrosion.
Technical Parameters
- Physical parameters
Phase change parameters: melting point is -100.6°C, boiling point is -78.2°C, critical temperature is 19.7°C, critical pressure is 3.04 MPa. Density: 5.734 kg/m³ in gaseous state (20°C), 16.08 kg/m³ in liquid state (-78.2°C).
There are two crystal forms in the solid state, and the phase change temperature is -170°C (103K).Solubility: slightly soluble in water, slightly soluble in methanol. Chemical stability
The C-F bond energy is extremely high, and it has no tendency to self-decompose or polymerize under normal conditions. However, it may decompose to produce toxic hydrogen fluoride (HF) at high temperatures (such as fire).Safety risks Toxicity: Low toxicity (LC50 for rat inhalation >20,000 ppm/2h), but high concentrations can cause suffocation. Liquid contact can cause frostbite and requires rewarming with 38-42°C warm water. Storage and transportation : Pressure-resistant cylinders (UN 2193) are required to avoid high temperatures or mechanical shock.
Hexafluoroethane Packaging
MOQ： 1 Cylinder (52.6KG).
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Disposable Cylinder: 15lbs, 30lbs, 50lbs;
CE Cylinder: 12L, 13.6L, 50L;
DOT: 30lbs, 50lbs;
Besides, we can provide 50L, 60L, 100L, 400L, 500L, 800L, 926, 1000L cylinders, and low & high pressure tank.
Please click here for more details about our refrigerant packaging.
1. Due to shipping fee, our MOQ usually are 1150 cylinders (13.6kg), especially for destinations farther away, like South America or Africa;
2. For destinations that are relatively close or customers who are willing to bear the freight, 300-500 cylinders are OK, but please contact us for specific confirmation;
3. For some special refrigerants, like R508B and R23, the minimum order quantity can be less, please contact us for specific confirmation;
4. Please note that due to transportation or freight issues, we generally do not do retail. For one or two cylinders, please buy directly from local distributors. Thank you for your understanding.
Refrigerant prices are affected by international shipping costs, order quantity, or refrigerant industry fluctuations.
Please contact us with your destination port, refrigerant packaging and order quantity, our colleague will contact you soon for the relevant things about the price.
Yes, the import license is necessary. Besides, for EU customers, they also need HFC quota. If you are not sure of this, please contact us for more details.
Our factory is located in Quzhou City, Zhejiang Province, China. Welcome to visit our factory.